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Advanced. VAcuum & Clean equipment Optimizer

Equipment Line-up

Equipment Line-up

Solar

Furnace System

The furnace thermally processes batches of glass solar circuits in a controlled atmos..
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Solar

Horizontal In-Line System

SuVAS™ H-Series are used to deposit thin-film layers, such as back electrode, CIG pre..
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OLED System

OLED P-Aging System

Various defects and debris are generated during the evaporation process, resulting in..
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OLED System

OLED Encapsulation System

OEC Series equipment used in the production process of OLEDs by plasma-treated cover-..
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Sputtering System

Roll-to-Roll System(Flexible Substrate)

Roll to Roll SPUTTER is widely used for deposition on flexible film. The application..
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Sputtering System

Loader System

A return system that combines/disconnects substrates into the carrier and injects/dis..
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Module System

POL Attacher

LPA-4700 is used to attach Polarizer to LCD panels cleaned with a roller The instrum..
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OLED System

OLED Vacuum Transfer System

This system is a large-area deposition equipment that can deposit OLED organic materi..
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Sputtering System

Vertical Cluster Sputter (SuVas-CV Series)

SuVas-CV series is used for electrode layer process of LCD or OLED panel production b..
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Sputtering System

In-line Vetical Dynamic Sputter (SuVas-VD Series)

LSF Series is equipment for depositing oxide and metal materials in a vacuum state on..
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OLED System

OLED TFE In line System

OEC Series is an equipment used in the production process of OLED by cover-glass and ..
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OLED System

OLED Smart Tray System

Smart trays perform stepwise deposition on the glass surface for linear sources in th..
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OLED System

OLED Vacuum Oven System

Vacuum oven system for pre-evaporation process to remove impurities such as residual ..
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Sputtering System

In-line Horizontal Sputter (SuVas-HD Series)

SuVas-HD Series is used for electrode layer process of solar or architecture panel pr..
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Sputtering System

In-line Vetical Static Sputter (SuVas-VS Series)

LST Series is a device for depositing oxide and metal materials in a vacuum state on ..
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